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Line 53: − ===Ablation Rate===+
Diamond Radiator Thinning Using an Excimer Laser (view source)
Revision as of 21:34, 15 December 2016
, 21:34, 15 December 2016→Ablation Rate
==Ablation Rate==
The ablation rate of diamond using 193nm light was measured under a vacuum of 650 mtorr. The laser power was gradually decreased as each row was completed so that the complete operation range could be studied. The ablated surface was then measured using a Zygo white-light interferometer and the cut depth values for each row were extracted. These values were used in the model shown below to calculate the expected cut depth of a row as a function of the average laser energy. The figures below show the Zygo image of the ablated surface and the modeled cut depth.
The ablation rate of diamond using 193nm light was measured under a vacuum of 650 mtorr. The laser power was gradually decreased as each row was completed so that the complete operation range could be studied. The ablated surface was then measured using a Zygo white-light interferometer and the cut depth values for each row were extracted. These values were used in the model shown below to calculate the expected cut depth of a row as a function of the average laser energy. The figures below show the Zygo image of the ablated surface and the modeled cut depth.