A Lambda Physik EMG 101 argon fluorine (ArF) excimer laser (shown in Figure 2) with an operating wavelength of 193 nm was used to ablate single-crystal CVD diamond. The laser is capable of delivering 120 mJ at a maximum repetition rate of 50 Hz and pulse duration of 20 nanoseconds. The pulse geometry is an asymmetrical flat top Gaussian with horizontal dimensions of 22 mm and vertical dimensions of 6 mm. | A Lambda Physik EMG 101 argon fluorine (ArF) excimer laser (shown in Figure 2) with an operating wavelength of 193 nm was used to ablate single-crystal CVD diamond. The laser is capable of delivering 120 mJ at a maximum repetition rate of 50 Hz and pulse duration of 20 nanoseconds. The pulse geometry is an asymmetrical flat top Gaussian with horizontal dimensions of 22 mm and vertical dimensions of 6 mm. |