581
edits
Changes
Jump to navigation
Jump to search
Line 71:
Line 71: + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
Diamond Radiator Thinning Using an Excimer Laser (view source)
Revision as of 21:15, 15 December 2016
, 21:15, 15 December 2016→Ablation Rate
|-
|-
|}
|}
The ablation rate was calculated using the model shown below in Eq. 1
and accounts for the overlap between neighboring laser pulses as well as the
12
fluctuations in laser energy (elaser) from row to row.
R(elaser) = U(y) ∗ δx ∗ δy
V0
(1)
U(y) is the number of microns removed (in µm) from the diamond surface
after ablation at a particular y coordinate as measured from the Zygo interferometer,
δx and δy are the distances between neighboring pulses (both
10µm) and V0 was a normalization parameter representing the depth cut in
diamond from a single laser pulse. The data collected from Figure 9a was
used in Eq. 1 and plotted as a function of the laser energy shown in Figure
9b. The fit of Figure 9 was made using a second order polynomial and is
shown below in Eq. 2.
R(elaser) = 245.347x
2 + 5.440x − 2.390 (2)
During the ablation process the average laser energy was measured for
each completed row and the corresponding ablation rate was calculated using
Eq. 2. The ablation rate calculated from the last completed row was used
to determine its overlap with the next row of laser pulses. The overlap was
adjusted by weighting a standard step size made by the y-translation stage
(y-step) by the ratio of the measured ablation rate with a desired rate of
ablation as shown in Eq. 2.
delta-y = R(measured)
R(desired)
∗ y-step (3)
Stacking laser pulses on top of eachother increases the amount of diamond
material removed within the region of overlap. This method was used to
account for laser energy fluctuations while differentially ablating diamond to
within ±0.5µm surface variation.
==Ablation Rate==
==Ablation Rate==