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Diamond Radiator Thinning Using an Excimer Laser (view source)
Revision as of 20:13, 5 November 2009
, 20:13, 5 November 2009→Work Schedule
==Work Schedule==
==Work Schedule==
The following is a list of tasks required to get the Ar-F excimer laser online.
The following is a list of tasks required to get the Ar-F excimer laser online.
* First, take the proper safety course required by the University of Connecticut Environmental Health and Safety department.
* Prepare Dr. Well's laboratory for the transfer of the Excimer laser including setup of ventilation, three-phase (208V) power supply, cold water distribution and collection, and a sturdy table to put the laser on.
* Replacement of Halogen Filters
* Tend to the vacuum system: replace oil in diffusion pump, test for serious leaks at moderately low pressure (10−6 Torr)
* Tend to the vacuum system: replace oil in diffusion pump, test for serious leaks at moderately low pressure (10−6 Torr)
* Test the RF generator (most expensive/hard to replace!)
* Test the RF generator (most expensive/hard to replace!)
* Procure a bottle of pure Ar gas
* Procure a bottle of pure Ar gas
* Check internal circulating fan bearings, as these are a possibly source of corrosion
* Flush the tube, turn it on and test output power
* Flush the tube, turn it on and test output power
* In case of problems, another group has a system out of commission and may allow us to salvage pieces. Barring major repair: expected online by end of 2009 with $2-3k
* Barring major repair: expected online by end of 2009 with $2-3k
Long-term operating goals:
Long-term operating goals:
* Switch optics to 192nm
* Switch optics to 192nm
* Get mixture of Ar-F, eventually procure a gas mixing system)
* Get mixture of Ar-F, eventually procure a gas mixing system)
* Ensure reliable pulse train and consistent power output (±5%)
* Ensure reliable pulse train and consistent power output (±5%)
==Updates==
==Updates==
* Original documentation of the Lambda Physik EMG 101 MSC Excimer laser has been scanned and posted on the following page,
* Original documentation of the Lambda Physik EMG 101 MSC Excimer laser has been scanned and posted on the following page,