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Diamond Radiator Thinning Using an Excimer Laser (view source)
Revision as of 15:38, 2 June 2010
, 15:38, 2 June 2010→Updates for May 2010
*I found an [http://www.airproducts.com/NR/rdonlyres/D46880D1-71BA-4C0B-A326-6D79EF8E122F/0/467MI.pdf article] which stresses that unclean gas handling lines can contain hydrocarbons which react with fluorine gas to produce <math>CF_4</math>, which can have a negative effect on pulse duration in ArF excimer lasers. Looking at the lines we currently use, it was clear that this may be an issue as they were from Dr. Eyler's original setup used for XeCl.
*I found an [http://www.airproducts.com/NR/rdonlyres/D46880D1-71BA-4C0B-A326-6D79EF8E122F/0/467MI.pdf article] which stresses that unclean gas handling lines can contain hydrocarbons which react with fluorine gas to produce <math>CF_4</math>, which can have a negative effect on pulse duration in ArF excimer lasers. Looking at the lines we currently use, it was clear that this may be an issue as they were from Dr. Eyler's original setup used for XeCl.
*A new line has been installed and in order to remove and moisture from inside the line, I have "baked" it for over and hour at <math>110\,^\circ C</math> while under vacuum. After the system cooled to <math>60\,^{\circ}{\rm C}</math> I bled the lines and left fresh fluorine in the line for passivation. After 24 hours I will purge the system and give it a fresh fill, then test the laser output.
*A new line has been installed and in order to remove and moisture from inside the line, I have "baked" it for over and hour at <math>110\,^\circ C</math> while under vacuum. After the system cooled to <math>60\,^{\circ}{\rm C}</math> I bled the lines and left fresh fluorine in the line for passivation. After 24 hours I will purge the system and give it a fresh fill, then test the laser output.
==Updates for May 2010==
*After reinstalling the new 304L steel fluorine gas line, the red light seen in the passivation procedure lasted over 11.5 minutes. However, the laser beam is still on the 5 minute time scale.
*Using the [File:coherent_sensor.pdf Coherent J45LP-MUV] pyro-electric energy sensor coupled to a oscilloscope, it is possible to observe the laser beam quantitatively.
==Passivation for ArF==
==Passivation for ArF==