A roughing pumps was attached to one of the ports on the ablation chamber while a second port was connected to a digital flow controller and needle valve. This enabled the user to maintain a constant pressure to within 1 mtorr over the course of an ablation run. Vacuum pressures of a few tens of mtorr were achievable using this setup, however were not typically desired due to the large amounts of amorphous carbon build up after ablation occurred. | A roughing pumps was attached to one of the ports on the ablation chamber while a second port was connected to a digital flow controller and needle valve. This enabled the user to maintain a constant pressure to within 1 mtorr over the course of an ablation run. Vacuum pressures of a few tens of mtorr were achievable using this setup, however were not typically desired due to the large amounts of amorphous carbon build up after ablation occurred. |