Diamond Radiator Thinning Using an Excimer Laser

Laser Thinning of Diamond
A research group at Brookhaven National Laboratory (BNL) published results using a focused high-power UV laser to mill diamond via a process known as ablation. Lasers with wavelengths above the band gap of diamond (213 nm) can excite electrons between the diamonds carbon atoms from a bound state to an ionized state. The top 100 nm of the diamond surface at the focal spot is instantly vaporized, emitting a plume of carbon-based plasma normal to the surface of the diamond crystal. By scanning the diamond across the focal spot, a sequence of overlapping spots is built up that results in uniformly milling the sample surface. The short duration (10 ns) and short absorption length (50 nm) of the laser pulse ensure that the pulse energy is absorbed in the upper 100 nm of the diamond and does not result in deep energy deposition in the bulk of the crystal. Most importantly, this technique allows the diamond to be thinned deferentially, creating a central window of 20 microns thickness while retaining the full thickness around the edges for stiffness and support. This would never be possible with an abrasive technique. The laser ablation technique on diamond was developed extensively here at UConn by the author, using a Lambda Physik EMG 101 excimer laser operating at a wavelength of 193 nm as the light source. An XYZ computer controlled stage was constructed to sweep the diamond (under a vacuum of 600 mtorr) across the laser focus. The bulk diamond crystal before machining is typically of size 7.2 x 7.2 x 0.250 mm^3. A series of laser pulses was applied to a rectangular region in the center of the diamond, milling a thin window down to the required thickness and leaving untouched a zone around the perimeter which is called the frame. The components of the experimental setup shown in Figure 1 are discussed in detail in the sections below.

Excimer Laser
A Lambda Physik EMG 101 argon fluorine (ArF) excimer laser (shown in Figure 2) with an operating wavelength of 193 nm was used to ablate single-crystal CVD diamond. The laser is capable of delivering 120 mJ at a maximum repetition rate of 50 Hz and pulse duration of 20 nanoseconds. The pulse geometry is an asymmetrical flat top Gaussian with horizontal dimensions of 22 mm and vertical dimensions of 6 mm. Excimer lasers produce UV light via the spontaneous/stimulated emission of an excited complex comprised of a halogen, noble and buffer (fluorine, argon and helium respectively). These pseudo-molecules are created inside 3 the laser cavity by large electric fields and live for only a short period of time before photo-emission occurs. Afterwards, the halogen and noble gases undergo a refractory period during which they cannot be re-excited. The internal mechanics of the Lambda Physik EMG 101 excimer laser provides a continuous flow of fresh lasing medium into the laser cavity via a circulating fan. Figure 3 depicts the cross section of a typical excimer laser and illustrates the path of the laser gas medium. As shown, after the laser gas undergoes emission it passes over a series of heat exchangers. At repetition rates greater than 3 Hz a cooling unit must be run which passes 30◦ C de-ionized water through these heat exchangers. Once the hot gas is cooled it passes through particulate filters and is sent back into the laser tube to begin the cycle again. As this process continues the halogen component of the lasing medium reacts with the non-passivated metal released by the discharge of the laser cavity’s pre-ionization pins and other contaminants within the laser cavity. This contamination of the halogen gas reduces the average pulse energy of the laser until no lasing occurs and the 4 gas mixture must be completely replaced. For the purposes of laser ablating diamond, the laser gas medium is replaced when the average pulse energy is less than 50 mJ. Lambda Physik specifies this model laser can fire 400,000 pulses before the specified power reaches 50%. Assuming the laser starts at a maximum power of 120 mJ the laser would produce 480,000 pulses before it reached the minimum pulse energy of 50 mJ and had to be refilled. A 7.2 x 7.2 x 0.25 mm^3 diamond thinned with a central region of dimensions 6.7 x 6.7 x 0.02 mm^3 would require approximately 450,000 pulses per single complete pass over the diamond (assuming 0.5 mm s motor speed in x direction, 50 Hz laser repetition rate, and 0.01 mm motor step in y axis). An average cut depth of 38µm per complete pass would estimate a total of over 2.6 million pulses to reach the final depth of 20 µm or roughly 7 complete laser medium fills. The ablation setup has methods to compensate for fluctuations in average laser energy so that the diamond surface remains smooth to within ± 0.5µm (these methods will be discussed in detail in a later section). However, even with these corrections, allowing the average laser energy to vary by 50% over the course of a single pass results in non-uniform ablation across the diamond which is too exaggerated to compensate for. It is then desirable to extend the lifetime of the laser gas medium so that average power remains constant over a single pass. Ideally, the laser would have a gas life time which exceeds the total number of pulses required to bring the diamond sample to 20µm. An Oxford GP-2000 cryogenic gas purification system and Millipore particulate filter were installed in a closed loop with the laser cavity as shown in Figure 1. The system pumps the laser gas medium through a liquid nitrogen cold trap removing contaminants generated during the lasing process, extending the laser gas life time by over an order of magnitude. The plot below shows the average pulse energy as a function of pulses completed.

Gas Purification System
specs on GP2000



Laser Beamline
laser optics



Focal Study



 * Color maps of the two orthoganol scans of beam focal region, where the color represents the charge per pulse seen on the wire in arbitrary units.
 * Projections of the color maps shown in Figure 6 onto the transverse axis with Gaussian fits to central peak over a flat background.]]

Ablation Rate
ablation rate

FORTRAN Simulations of Beam Spot

 * A FORTRAN program has been written which simulates rays exiting the laser aperture and then propagating through a fused silica plano-convex lens. Using this program we can now observe the geometry of the beam as it passes through the focusing lens onto a target. We have seen that the beam leaving the laser aperture has a flat top distribution in the X plane and a Gaussian distribution in the Y. As the beam is focused both the X and Y projections achieve Gaussian distributions.
 * Taking the X and Y projections of the focused beam and fitting them with a Gaussian distribution,we are able to attain $$\sigma_{X} = 0.63mm\,$$ and $$\sigma_{Y} = 0.23mm \,$$.


 * Assuming a Gaussian distribution at the waist of the beam, we now find the FWHM (full width at half maximum) by the following relation,


 * $$\mathrm{FWHM} = 2 \sqrt{2 \ln 2}\ \sigma. $$


 * The smallest values of $$\mathrm{FWHM_{X}}$$ and $$\mathrm{FWHM_{Y}}$$ were 1.49mm and 0.552mm respectively.
 * The Rayleigh Length, $$\mathrm{Z_{R}}$$ is defined as the distance from the beam waist along the axis of propagation to the point where its cross section is doubled ($$\mathrm\omega_{R}$$). This value represents the "play" we will have when trying to focus the beam onto the diamond target for ablation. Taking $$\mathrm\omega_{0}$$ as the beam waist, and using the $$\mathrm{FWHM}$$ as its value we are looking for the point where,
 * $$\omega_{R} = \sqrt{2}\ \omega_{0}. $$


 * Plotting $$\mathrm\omega_{R}$$ as a function of distance away from the beam waist center, we find an average Rayleigh Length,
 * $$\mathrm{Z_{RX}} =11.8mm$$ and $$\mathrm{Z_{RY}} =10.5mm$$


 * Knowing $$\mathrm\omega_{0}$$ also allows us to calculate the theoretical fluence of the beam. Assuming maximum power of 220mJ over a 1.49mm x 0.552mm area yields $$26J/cm^2.$$ Which is above the $$14J/cm^2$$ threshold value cited by Brookhaven National Laboratories who were conducting diamond ablation experiments with a 213nm Nd:YAG laser (213nm with the use of a 4 + 1 frequency mixing crystal). Our ArF excimer laser produces 193nm light that will be more readily absorbed by the surface of the diamond as diamond is opaque to wavelengths above the band gap. These calculations provide a level of confidence that we theoretically will be able to ablate diamond.

Ablation Software

 * ablator.C: Core software used in creating ablation raster files.
 * ablator.h: Header file for ablator.
 * Map2D.cc: Package required to run ablator.
 * Map2D.h: Header file for Map2D.
 * ablate.py: Python module with custom methods for processing Zygo images for use in ablator.
 * zygo2root.C: Software for converting hitched Zygo data files into root files.
 * zfinder.cc: Package needed for zygo2root
 * MetroProMap.cc: Package needed to run Zygo2root software.
 * MetroProMap.h : Header file for MetroProMap.
 * setenv.sh: sample of environment variables required to run above software.